Optical microscope image of the silicon photonic chip area in the left and a closer view of the suspended MEMS micro-ring resonator filter in the right. Successful integration of the MEMS device in ...
The design and fabrication of the proposed MEMS accelerometer. a Schematic diagram of the accelerometer with two-layered proof mass. The upper layer has flexures, stiffness tuning electrodes, and ...
The MEMS confocal unit can be connected to an inverted microscope to allow for confocal fluorescence imaging. Depending on the needs, the MAICO line-up provides three variations with varying ...
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