Ultra-fast correlative chemical-mechanical-polishing (CMP) metrology: integrating phase shifting interferometry with active-probe scanning probe microscopy
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Ultra-fast correlative chemical-mechanical-polishing (CMP) metrology: integrating phase shifting interferometry with active-probe scanning probe microscopy
This paper presents the development of an Ultra-Fast Correlative Metrology method that integrates high-accuracy phase-shifting interferometry (PSI) with active probe-atomic force microscopy (AP-AFM). PSI is a widely used optical metrology technique for precise surface roughness measurements, refractive index mapping, and other optical parameter ...
10 months ago
Sensor CMP Equipment
Video Completo en mi canal de Youtube https://youtu.be/cPIsBnsrewU | Gary Lemuz Electricidad Automotriz
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Video Completo en mi canal de Youtube https://youtu.be/cPIsBnsrewU | Gary Lemuz Electricidad Automotriz
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